| URN | etd-0810115-153909 | Statistics | This thesis had been viewed 400 times. Download 3 times. |
| Author | Pei-hsiang Liao | ||
| Author's Email Address | pei.hsiang.liao@gmail.com | ||
| Department | Institute Of Mechanical Engineering | ||
| Year | 2014 | Semester | 2 |
| Degree | Master | Type of Document | Master's Thesis |
| Language | zh-TW.Big5 Chinese | Page Count | 111 |
| Title | The Study on the Nanopositioning Stage by Hydraulic Actuator | ||
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| Abstract | In this study the ANSYS is used for micro-motion stage aided design. First several cases have been set up in accordance with literatures. The result of analysis has revealed that the combination of wave-shaped rib (R1 type) and cross-shaped spring (S1 type) has led to minimum error of displacement. And then the stage based on R1S1 combination has been fabricated with hydraulic cylinder as the actuator and micrometer as the controller to control the stage displacement. In the end, the Bestview ZL high power zoom microscope has been used for observing the experimental amount of displacement to see if it meets the expectation, and the reliability of finite element model can be verified via modal experiment. In this study the nano-scale micro-motion stage with long stroke positioning has been achieved by flexible structure stage in coordination with hydraulic cylinder and micrometer. It has been indicated by the measurements of four round trips have revealed that there will only be a rather large error of initial displacement (when the displacement at output terminal is 0) generated after repeated operation, while the measured values at all points are fairly close to the theoretical values with consistent errors among all measurements. This phenomenon is an indication of excellent repetitive positioning function, based on which a very precise positioning result can be obtained via compensation mechanism. By verifying the detection results of finite element model via modal experiment, it is found that the finite element model established in this study can reach a dynamic reaction not 100% identical but very close to the actual object. Therefore, this study can be deemed as a rather successful case of the aided design via finite element analysis software. |
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| Files | indicate in-campus access at 1 years and off-campus access at 3 years | ||
| Date of Defense | 2015-07-24 | Date of Submission | 2015-08-11 |