| URN | etd-0728110-160337 | Statistics | This thesis had been viewed 793 times. Download 3 times. |
| Author | Chien-ming Kao | ||
| Author's Email Address | kiss_ken_sky@yahoo.com.tw | ||
| Department | Institute of Mechatronic Engineering | ||
| Year | 2009 | Semester | 2 |
| Degree | Master | Type of Document | Master's Thesis |
| Language | zh-TW.Big5 Chinese | Page Count | 123 |
| Title | The studies on nanostructured TiAlN/CrSiN multilayer thin films prepared by the pulsed DC magnetron sputtering system | ||
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| Abstract | Nine TiAlN/CrSiN nanoscale multilayered thin films were deposited periodically by a bipolar asymmetric pulsed DC reactive magnetron sputtering technique. The crystalline structures and bilayer period of multilayer coatings were characterized by a glancing angle X-ray diffractometer. The surface and cross-sectional morphologies of thin films were examined by a scanning electron microscopy (SEM) and transmission electron microscopy (TEM), respectively. The surface roughness of thin films was explored by an atomic force microscopy (AFM). A nanoindenter, a micro Vickers hardness tester and pin-on-disk wear tests were used to evaluate the hardness, fracture toughness and tribological properties of the thin films, respectively. Electrochemical tests in 3.5 wt.% NaCl aqueous solution were performed to evaluate the corrosion resistance of multilayered coatings. Ten coatings with bilayer period ranges from 6 nm to 40 nm were produced in this work. It was observed that the hardness increased with increasing bilayer period and reached the maximum at 20nm and then leveled off at periods larger than 20nm. An optimal hardness, plastic deformation resistance, tribological and anti-corrosion behaviors were found on the coating with a critical bilayer thickness of 20 nm. On the other hand, four multilayered thin films with fixed 20 nm bilayer periods and various thickness rations of TiAlN to CrSiN layers were fabricated. The surface roughness and mechanical properties decreased with increasing thickness values of CrSiN layer. The coefficient of friction values decreased with increasing thickness values of CrSiN layer. Meanwhile, no apparent corrosion resistance differences were found on these multilayered coatings. |
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| Files | indicate in-campus access at 3 years and off-campus access at 5 years | ||
| Date of Defense | 2010-07-08 | Date of Submission | 2010-07-28 |