Title page for etd-0726119-213056


URN etd-0726119-213056 Statistics This thesis had been viewed 139 times. Download 0 times.
Author Chien-Hung Chang
Author's Email Address No Public.
Department Technology for electrical engineering
Year 2018 Semester 2
Degree Master Type of Document Master's Thesis
Language zh-TW.Big5 Chinese Page Count 30
Title Characteristic Analysis of Aluminum Gallium Nitride Films
with Different Aluminum Contents
Keyword
  • Hall measurement
  • aluminum gallium nitride film
  • four-point probe
  • X-ray diffraction
  • X-ray diffraction
  • four-point probe
  • aluminum gallium nitride film
  • Hall measurement
  • Abstract The aluminum gallium nitride film is an optoelectronic semiconductor material with high thermal stability and wide energy gap characteristics from 3.4 to 6.2 eV, so it can be applied to high power, high speed optoelectronic components; or applied to the wavelength of far ultraviolet to excite The light source in the blue to ultraviolet region is generated to form a light emitting diode.
    In order to further analyze the characteristics of aluminum gallium nitride film, this paper will measure the concentration of different aluminum in aluminum gallium nitride film (4%, 13%, 17% and 22%) using four-point probe equipment. The resistance characteristics, X-ray diffraction analysis to detect the change of the diffraction peak and the Hall effect measurement measured the carrier concentration and mobility rate and other measurements to analyze the correlation characteristics of different aluminum concentration of aluminum gallium nitride film.
    Advisor Committee
  • Yueh-Chien Lee - advisor
  • Hsi chiang chou - co-chair
  • none - chair
  • Files indicate in-campus access at 5 years and off-campus access at 5 years
    Date of Defense 2019-07-26 Date of Submission 2019-07-30

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