| URN |
etd-0726111-232259 |
Statistics |
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|
| Author |
Po-Chi Huang |
| Author's Email Address |
No Public. |
| Department |
Institute of Mechatronic Engineering |
| Year |
2010 |
Semester |
2 |
| Degree |
Master |
Type of Document |
Master's Thesis |
| Language |
zh-TW.Big5 Chinese |
Page Count |
145 |
| Title |
Effects of alloying elements on the properties of CrAlN thin film |
| Keyword |
nano-indenter
nano-composite films
high-temperature oxidation.
pulsed DC magnetron sputtering
chromium-based films
RF magnetron sputtering
RF magnetron sputtering
chromium-based films
pulsed DC magnetron sputtering
high-temperature oxidation.
nano-composite films
nano-indenter
|
| Abstract |
The mechanical properties of CrN thin films can be improved try the addition of small amount of Si. The drastic oxidation will be found for the CrN thin film when the temperature is higher than 700oC. The oxidation resistance of the CrN thin film can be enhanced by the addition of Al to form Al2O3 protective layer. In the first stage six TiAlCrSiN thin films with gradient chemical composition were fabricated using the pulsed DC magnetron sputter system. In the second stage, five CrAlSiN thin film with different Si contents ranging from 0.9% to 10.1 at.% were prepared using Co-sputtering procure of two DC cathodes and one RF cathode. In this work, the crystalline structure was analyzed using grazing angle XRD. The surface roughness was evaluated by an atomic force microscopy. The surface and cross-sectional morphologies of thin film were investigated by SEM and TEM, respectively. The nano indentation, microhardness tester and pin-on-disk wear test were adopted to explore the mechanical properties of coating. The oxidation resistance of CrAlSiN thin films was evaluated by the high temperature oxidation test at 800oC for 24hrs. For the CrAlSiN thin film, if was found that the surface roughness and the width of columnar structure decreased with increased Si content. The hardness increased with Si content instead. |
| Advisor Committee |
Hsin-Pei Chen - advisor
Jyh-Wei Lee - advisor
Yin-Yu Chang - co-chair
|
| Files |
indicate in-campus access at 1 years and off-campus access at 2 years |
| Date of Defense |
2011-07-21 |
Date of Submission |
2011-07-28 |
