| URN |
etd-0726111-201120 |
Statistics |
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|
| Author |
Meng-Ko Wu |
| Author's Email Address |
kf204924@msn.com |
| Department |
Institute of Mechatronic Engineering |
| Year |
2010 |
Semester |
2 |
| Degree |
Master |
Type of Document |
Master's Thesis |
| Language |
zh-TW.Big5 Chinese |
Page Count |
131 |
| Title |
The studies of bilayer period on nanostructured CrSiN/TiAlN multilayer thin films |
| Keyword |
fracture toughness
bilayer period
pulsed DC reactive magnetron sputtering
CrSiN/ TiAlN multilayered thin films
CrSiN/ TiAlN multilayered thin films
pulsed DC reactive magnetron sputtering
bilayer period
fracture toughness
|
| Abstract |
Seven CrSiN/TiAlN nanoscale multilayered thin films were deposited periodically by a bipolar asymmetric pulsed DC reactive magnetron sputtering technique. The crystalline structures of multilayer coatings were characterized by a glancing angle X-ray diffractometer. The surface and cross-sectional morphologies of thin films were examined by a scanning electron microscopy (SEM) and transmission electron microscopy (TEM), respectively. The surface roughness of thin films was explored by an atomic force microscopy (AFM). The nanoindenter, Vickers micro hardness, pin-on-disk wear, HRC-DB adhesion and thin film impact tests, were used to evaluate the hardness, fracture toughness, tribological properties, adhesion and fatigue life of the thin films, respectively. Electrochemical tests in 3.5 wt.% NaCl aqueous solution were performed to evaluate the corrosion resistance of multilayered coatings. The thickness ratio of CrSiN to TiAlN layers was fixed at 1:1. The bilayer periods of the coatings were controlled to be from 6 to 40 nm. The maximum hardness (31GPa), good tribological and good anticorrosion performance of the multilayers were obtained when the bilayer period was at 10nm for the coating with the same thickness ratio of CrSiN to TiAlN layers (1:1). |
| Advisor Committee |
Jen-Ching Huang - advisor
Jyh-Wei Lee - advisor
Fan-Bean Wu - co-chair
|
| Files |
indicate in-campus access at 1 years and off-campus access at 2 years |
| Date of Defense |
2011-07-20 |
Date of Submission |
2011-07-27 |
