| URN | etd-0720109-223944 | Statistics | This thesis had been viewed 974 times. Download 0 times. |
| Author | Jian-Jie Huang | ||
| Author's Email Address | lid765@hotmail.com | ||
| Department | Institute of Electrical Engineering | ||
| Year | 2008 | Semester | 2 |
| Degree | Master | Type of Document | Master's Thesis |
| Language | zh-TW.Big5 Chinese | Page Count | 98 |
| Title | Intelligent constant force feedback controller design for Atomic Force Microscopes | ||
| Keyword | |||
| Abstract | This paper develops a constant force feedback mechanism based on fuzzy logic for a tapping mode Atomic Force Microscope. Then, a PID-like fuzzy controller is designed to overcome the shortcomings of a traditional PID controller in a tapping mode Atomic Force Microscope. By using the PID-like fuzzy controller, the cantilever tip can track the surface of the sample rapidly and accurately even though the topology of the surface is arbitrary and not given a priori. The rapid tracking response allows us to observe high aspect ratio micro structure accurately and quickly. The tip crash resulting from overshoot in commercial AFM with a traditional PID controller could be avoided. Additionally, continuous gain tuning in commercial AFMs to schedule the controller efforts is alleviated. In final, a computer simulation is provided to demonstrate the effectiveness and confirm validity of the proposed controller. |
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| Files | indicate not accessible | ||
| Date of Defense | 2009-07-03 | Date of Submission | 2009-07-22 |