| URN |
etd-0715109-204052 |
Statistics |
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|
| Author |
Chia-Lin Li |
| Author's Email Address |
leonj99@hotmail.com |
| Department |
Institute of Mechatronic Engineering |
| Year |
2008 |
Semester |
2 |
| Degree |
Master |
Type of Document |
Master's Thesis |
| Language |
zh-TW.Big5 Chinese |
Page Count |
111 |
| Title |
The studies on nanostructured Cr2N/Cu multilayer thin films prepared by the pulsed DC magnetron sputtering system |
| Keyword |
antibacterial property
fracture toughness
Cr2N/Cu multilayered coating
pulsed DC reactive magnetron sputtering
bilayer period
bilayer period
pulsed DC reactive magnetron sputtering
Cr2N/Cu multilayered coating
fracture toughness
antibacterial property
|
| Abstract |
Ten nanostructured Cr2N/Cu multilayer coatings were deposited periodically by a bipolar asymmetric reactive pulsed DC magnetron sputtering system. The crystalline structure of multilayer coatings was determined by a glancing angle X-ray diffractometer. Microstructures of thin films were examined by an atomic force microscopy (AFM), scanning electron microscopy (SEM) and transmission electron microscopy (TEM). A nanoindenter, a micro Vickers hardness tester and a pin-on-disk wear tester were used to evaluate the hardness, fracture toughness and tribological properties of the thin films, respectively. Electrochemical tests in 3.5 wt.% NaCl aqueous solution were performed to evaluate the corrosion resistance of multilayered coatings. The antibacterial properties of coatings were also investigated. The bilayer period of the nanostructured multilayer coatings were controlled within the range from 5 to 40 nm. It was found that the hardness increased with decreasing bilayer period and leveled off at small periods around 6-12 nm. The Cr2N/Cu multilayered coatings with bilayer periods of 5 and 6 nm exhibited a combination of high hardness, good tribological and good anticorrosion performance in this study. On the other hand, the best antibacterial property was observed on the multilayered coating with a bilayer period of 20 nm. |
| Advisor Committee |
Jyh-Wei Lee - advisor
none - co-chair
none - co-chair
|
| Files |
indicate in-campus access at 1 years and off-campus access at 2 years |
| Date of Defense |
2009-07-03 |
Date of Submission |
2009-07-15 |
